JPH0367442U - - Google Patents

Info

Publication number
JPH0367442U
JPH0367442U JP12930189U JP12930189U JPH0367442U JP H0367442 U JPH0367442 U JP H0367442U JP 12930189 U JP12930189 U JP 12930189U JP 12930189 U JP12930189 U JP 12930189U JP H0367442 U JPH0367442 U JP H0367442U
Authority
JP
Japan
Prior art keywords
wafer
protective sheet
peeling device
tape
release tape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12930189U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0749796Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989129301U priority Critical patent/JPH0749796Y2/ja
Publication of JPH0367442U publication Critical patent/JPH0367442U/ja
Application granted granted Critical
Publication of JPH0749796Y2 publication Critical patent/JPH0749796Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
JP1989129301U 1989-11-07 1989-11-07 ウエハの保護シート剥がし装置 Expired - Lifetime JPH0749796Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989129301U JPH0749796Y2 (ja) 1989-11-07 1989-11-07 ウエハの保護シート剥がし装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989129301U JPH0749796Y2 (ja) 1989-11-07 1989-11-07 ウエハの保護シート剥がし装置

Publications (2)

Publication Number Publication Date
JPH0367442U true JPH0367442U (en]) 1991-07-01
JPH0749796Y2 JPH0749796Y2 (ja) 1995-11-13

Family

ID=31676940

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989129301U Expired - Lifetime JPH0749796Y2 (ja) 1989-11-07 1989-11-07 ウエハの保護シート剥がし装置

Country Status (1)

Country Link
JP (1) JPH0749796Y2 (en])

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004207719A (ja) * 2002-12-23 2004-07-22 Samsung Electronics Co Ltd 半導体パッケージの組立て方法及び半導体パッケージ工程の保護テープの除去装置
JP2007057986A (ja) * 2005-08-25 2007-03-08 Nakabayashi Co Ltd 路線図
JP2007171472A (ja) * 2005-12-21 2007-07-05 Pia Corp 地図
JP2007214343A (ja) * 2006-02-09 2007-08-23 Disco Abrasive Syst Ltd 保護テープの剥離方法
JP2008072134A (ja) * 2007-10-15 2008-03-27 Lintec Corp シート剥離装置および方法
CN101969018A (zh) * 2009-07-16 2011-02-09 株式会社高鸟 保护胶带的剥离装置
JP2012028814A (ja) * 2011-10-24 2012-02-09 Lintec Corp シート剥離装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60187541U (ja) * 1984-05-21 1985-12-12 三菱電機株式会社 半導体ウエ−ハの保護テ−プはがし装置
JPH01272129A (ja) * 1987-11-28 1989-10-31 Nitto Denko Corp 保護フイルムの剥離方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60187541U (ja) * 1984-05-21 1985-12-12 三菱電機株式会社 半導体ウエ−ハの保護テ−プはがし装置
JPH01272129A (ja) * 1987-11-28 1989-10-31 Nitto Denko Corp 保護フイルムの剥離方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004207719A (ja) * 2002-12-23 2004-07-22 Samsung Electronics Co Ltd 半導体パッケージの組立て方法及び半導体パッケージ工程の保護テープの除去装置
JP2007057986A (ja) * 2005-08-25 2007-03-08 Nakabayashi Co Ltd 路線図
JP2007171472A (ja) * 2005-12-21 2007-07-05 Pia Corp 地図
JP2007214343A (ja) * 2006-02-09 2007-08-23 Disco Abrasive Syst Ltd 保護テープの剥離方法
JP2008072134A (ja) * 2007-10-15 2008-03-27 Lintec Corp シート剥離装置および方法
CN101969018A (zh) * 2009-07-16 2011-02-09 株式会社高鸟 保护胶带的剥离装置
JP2012028814A (ja) * 2011-10-24 2012-02-09 Lintec Corp シート剥離装置

Also Published As

Publication number Publication date
JPH0749796Y2 (ja) 1995-11-13

Similar Documents

Publication Publication Date Title
JPH0367442U (en])
JPS6440623U (en])
JPH01181064U (en])
JPS6420734U (en])
JPS5869299U (ja) 作業靴に取付ける汚染拡大防止部材
JPS6250783U (en])
JPS63119242U (en])
JPS6382748U (en])
JPH0362685U (en])
JPS61178307U (en])
JPH0311035U (en])
JPH03127379U (en])
JPH01122719U (en])
JPH0378543U (en])
JPH0335048U (en])
JPS62129006U (en])
JPH01128507U (en])
JPS61109638U (en])
JPH0231846U (en])
JPS6151311U (en])
JPS61111776U (en])
JPH0483321U (en])
JPH0448560U (en])
JPS6326322U (en])
JPH044757U (en])

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term